For use in making four point probe measurements. The RM3000 can supply constant currents between 10nA and 99.99mA, and measure voltages from 0.01mV to 1250mV. For sheet resistance measurements the quoted range is 1 milliohm/square to 5 x 108 ohms/square. Measurements outside this range are possible but with possible reduced accuracy. For volume (bulk) resistivity measurements the quoted range is 1 milliohm.cm to 1 x 106 ohm.cm. Measurements outside of this range may be possible but will depend on sample type e.g. whether the sample is a thin layer.
Unit Selection
Measurements can be displayed on screen as mV, ohms/square or ohm.cm. There is a facility to input either probe spacing or wafer thickness so that ohm.cm values can be automatically calculated and displayed.
Computer connection andSoftware
The RM3000 can be connected to computer by either USB or RS-232 connection. The customer can operate the unit using the computer keyboard, terminal emulation software such as HyperTerminal, or with the free software provided.