The CMT SR2000 is a completely automated, mapping four point measuring system. It offers precise and fiable mapping measurements of resistivity and sheet resistance.
The unit exists in two versions. N version allows the measurement of round wafers up to 8’’. The PV version, specifically designed for the photovoltaic industry, allows the measurement of square wafers 156x156mm and round wafers up to 230mm diameter.
The SR2000 comprises a current source with output 10nA to 100mA, DVM 0V to 2000mV and an accuracy of 0.2% (KRISS Circuits). The measurement accuracy is +/-0.5% (on VLSI standard wafer at 23C). The measured range goes from 1mOhm/sq to 2MOhm/sq (10uOhm*cm to 200kOhm*cm).
The JANDEL Probe Head, one of which is provided with the MultiHeight Station, can be completely customized following the user’s needs (tip radius, spacing, tips arrangement and load).